Magnification Reference Standards, Re-Calibration & Cleaning of LMRS
The LMRS-3 and LMRS-4 magnification reference standards are NIST/NPL traceable devices which allow for the accurate calibration of optical microscopes (transmitted and reflected light), scanning electron microscopes (in the secondary and backscattered electron imaging modes), and scanning probe instruments such as Scanning Tunneling and Atomic Force microscopes. The magnification range is from ~10X to 200,000X. The copyrighted pattern consists of a series of nested squares with pitches of 0.5, 1, 2, 50 and 500 mm. A 1mm X 6mm ruler is also included. Pattern height is a NIST traceable 0.1mm. Squares are used such that magnification can be calibrated in two directions. Pincushioning, bareling, skewness, and the accuracy of tilt angles can also be measured. The non-charging, yet optically transparent pattern offers high contrast and resistance to electron beam damage. New patterns also confirm particle size counting system accuracy. Newly available is the NPL traceable Micro-Ruler LMR-1, which has a 150mm scale with 0.01mm increments.