Hummer 8 Sputter Coater

For manually-controlled plating and processing. Ideal for low to moderate volume sputtering applications. Integral timer terminates processes at preset durations from 0 to 15 minutes so that operator can work on other tasks. Optional quartz crystal-based digital thickness monitor for accurate readings of sample coating thickness. Please Note!! The Hummer 8 does not have an etch mode.

Standard Features:

• Three sputter heads for uniform coating. Each sputter head may be controlled separately for sequential or concurrent sputtering of different metals. A chrome sputtering package is optional.
• Grain size of less than 2 nanometers for SEM preparation.
• Magnetically-enhanced sputter heads minimize sample heating.
• Automatic slow venting at termination of process.
• Sample stage accommodates up to 200 mm substrates or multiple SEM stubs.
• Stage adjusts 2" vertically.
• Self-contained two-stage direct drive rotary pump assures rapid pump down.
• Requires 
• less lab space than systems with remote pumps. 
• Easy access to pump oil fill and drain ports simplify maintenance.

Carbon Evaporation Accessory:

Operation: The CEA deposits thin films of carbon quickly and conveniently. Carbon is the preferred material for the conductive coating of EM specimens for energy dispersive X-ray analysis, since the carbon coating does not interfere with the analysis. All of the carbon rods are pre-sharpened allowing repeat settings for consistent coatings run to run. The carbon coating system evaporates a point source of carbon centered between two electrodes with up to 100 amps of electrical current. Safety interlocks ensure operator and machine safety. Samples up to 3.25" diameter or 12 microscope stubs can be coated in a single operation.

Carbon, the material of choice: Since carbon coating does not interfere with analysis, it is the preferred material for the conductive coating of EM specimens for energy dispersive X-ray analysis. Although carbon is not suitable for low energy sputtering, the CEA allows you to coat your specimens using the vacuum system and chamber of your of your Hummer sputter coater.

Fast and easy to use: The carbon coating accessory evaporates a point source of carbon centered between two electrodes with up to 100 amps of electrical current. Using the Hummer sputter coater for this process is faster and less expensive than conventional vacuum evaporators. An interchangeable top plate contains the electrodes for the carbon rods. The 10 Volt 100 Amp power supply requires no electrical connection to the Hummer.

Specifications: Input Power - 115 VAC, 50-60 Hz, 6 amps Power Supply - 10 Volts, 0-100 amps Dimensions - 13" L x 13" W x 12.5" H Weight - 45 lbs.

Quartz Thickness Monitor

This thickness monitor employs a unique sensing quartz crystal that oscillates at a very stable frequency. When the sensing element is placed in the chamber of the Hummer sputter coater, that stable frequency changes linearly with coating thickness and converts frequency shift to thickness. This value is displayed in nanometers with a digital readout.

The thickness monitor is simple to use. The material selector switch can be set for gold, gold/palladium, silver or platinum. This provides a direct continuous thickness reading in nanometers while sputter coating SEM/TEM specimens. Simply place the crystal in the chamber of a Hummer sputter coater, reset the measurement electronics to zero, and monitor thickness as the sputtering takes place. The digital readout indicates the total thickness as the coating occurs. The sensor provided is connected to the control unit with a 4 foot cable. The plug/socket crystals are easily changed and have a 10 micron lifespan.

Options:

• Wide selection of targets made from precious metals.
• Carbon evaporation accessory for producing conductive coatings on samples for x-ray studies.
• End point by quartz thickness monitor .
• Targets must be ordered separately.