Vacuum Equipment Including Sputtering Targets & Desiccator Cabinets

Annular sputter targets for Polaron E5100, SC510, SC515, SC7640 and SC7680 sputter coaters. 82mm OD X 60mm ID. Polaron systems have also been produced by Bio-Rad, VG Microtech, Fisons, Emscope and Quorum. Learn More

Glisseal is suitable for sealing and lubricating fixed and rotary ground glass joints and for greasing fittings made of plastics and metal. Learn More

Carbon rod points for the Anatech / Hummer Carbon Evaporation Accessory Learn More

Graphite rod points for use in Denton evaporation units. Learn More

Single strand of 0.020" diameter tungsten wire. Package of 10. Filaments are made of 0.020" diameter tungsten wire, 7.6 cm long. The 45o angled V-shape center is 17.5 mm deep. Learn More

This unit includes the following:

• Hummer 8 system
• Turbomolecular pump
• Quartz chamber 2 rpm rotating stage (8 inch diameter)
• Roughing vacuum pump with mist filter
• Sample stage - for up to 200 mm substrates

 

Turbo Sputter Coater, DC sputter head, Chromium - This unit is identical to TSC8 except that it also contains a DC sputter head and a DC power supply expressly for chromium sputtering. Please Note!! Requires water cooling.

 

Turbo Sputter Coater, RF and DC Power Supplies - This unit has a combination of RF and DC power supplies. Contains a single sputter source. Second sputter source can be added for an additional charge.

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A new economical Quartz Crystal Monitor (QCM) for measuring thin film deposition rate and thickness. This film thickness transducer is the simplest and least expensive QCM available anywhere. It connects directly to a USB port on your PC. Windows® - based software included for operation and data logging. It weighs less than 2 ounces and is small enough to fit in a shirt pocket.

 

The Film Thickness Transducer Includes:

• Windows based software for setup & operation
• QCM sensor Simulator/Tester
• 6" BNC Cable (connects unit to feedthrough)
• 10' USB Cable (connects unit to your PC)

 

Important Note:

The Q-Pod Film Thickness Transducer includes everything you need outside the chamber. For a complete measurement system, you also need to order a sensor, feedthrough, in-vacuum cable, and crystals.

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This unit consists of a Hummer 6.6 (Cat. No.: SC6.6) with a turbo pump, a 8" cylinder, a 6" plate and a stage for large wafers or substrates. For sputtering noble metals only. Learn More

Chiller/Recirculator Learn More